• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a method for the laser-optical detection of a surface movement of a sample (1), in which a first laser reference beam (10) is aligned with a first laser measuring beam (12) aligned with and reflected by the sample (1) first photorefractive / electro-optical element (4) is superimposed. In addition, a second reference beam (11) identical to the first reference beam (10) is superposed with a second measuring beam (13) identical to the first measuring beam (12) in a second photorefractive / electro-optical element (5). Inverse voltages are applied to the two photorefractive / electro-optical elements (4, 5). The light emerging from the photorefractive / electro-optical elements (4, 5) is converted into electrical signals, which are subtracted from one another before the signal evaluation. Furthermore, an arrangement for carrying out said method is given.
    公开号:AT512908A4
    申请号:T1171/2012
    申请日:2012-10-31
    公开日:2013-12-15
    发明作者:Bernhard Josef Reitinger
    申请人:Fill Gmbh；Recendt Gmbh；
    IPC主号:
    专利说明:

    25 11:34:27 31-10-2012 5/29 • ft
    • ♦ • ♦ 1 • ft * · ♦ ft • ft • ft
    The invention relates to a method for the laser-optical detection of a surface movement of a sample, wherein obtained from a laser beam first reference beam with a received from said laser beam, aligned to the sample and reflected by this first measuring beam in a first photorefractive / elektro -optical element is superimposed. The light emerging from the first photorefractive / electro-optical element is converted into a first electrical signal and subsequently evaluated.
    Furthermore, the invention relates to an arrangement for the laser-optical detection of a surface movement of a sample, comprising a laser source which generates a laser beam, a first photorefractive / electro-optical element,
    Means for superposing a first reference beam obtained from a laser beam with a first measuring beam aligned with the sample and reflected by the sample in the first photorefractive / electro-optical element and obtained from this laser beam
    Means for converting the light emerging from the first photorefractive / electro-optical element into a first electrical signal.
    Such a method or such an arrangement are basically known and are used, for example, for material testing. In this case, a sample is excited to vibrate, for example by an excitation laser, which excites the sample to ultrasonic vibrations. The vibrations occurring on the surface are measured by laser interferometry and provide information about cavities in the interior of the sample as well as other inhomogeneities. N2012 / 1B500 31/10/2012 11:36
    No .: R075 P.005 / 029 25 11:35:04 31-10-2012 6/29 25 11:35:04 31-10-2012 6/29
    * I • * ♦ * 2
    Further prior art is known, for example, from US Pat. No. 5,080,491 A, US Pat. No. 5,131,748 A, CA 2,042,352 A1 and WO 97/39305 A1.
    A disadvantage of the initially got ileti Vei drive is that the received Gignal is relatively noisy. Although it is already attempted in US 5,080,491 A to obtain a better signal quality, but the structure is technically complicated and expensive. Another disadvantage is the need for mechanically moving mirror and a difficult to set operating point.
    An object of the invention is therefore to provide an improved method and an improved arrangement for the laser-optical detection of a surface movement of a sample. In particular, the signal quality is to be improved without overly complicating the necessary arrangement for the measurement. In particular, mechanically moving parts should be avoided if possible.
    The object of the invention is achieved with a method of the type mentioned, in which a reference to the first reference substantially identerzweiter reference! is superimposed with a first measuring beam substantially identical second measuring beam in a second photorefractive / electro-optical element and the light emerging from the second photorefraktlven / electro-optical element is converted into a second electrical signal before the evaluation of the first electrical signal is subtracted, wherein to the two photorefractive / electrophotographic optical elements to each other inverse voltages are applied.
    The object is further achieved with an arrangement of the aforementioned type, additionally comprising: a second photorefractive / electro-optical element,
    Means for applying inverse voltages to the first and second photorefractive / electro-optical elements,
    Means for generating a second reference beam substantially identical to the first reference beam,
    Means for generating a substantially identical to the first measuring beam
    N2ö13 / tSSOO 31/10/2012 11:37
    No .: R075 P. 006/029 25 11:35:44 31-10-2012 7/29
    • 4 4 I ············· 4 3 second measuring steel,
    Means for superimposing the second reference beam on the second measuring beam in the second photorefractive / electro-optical element,
    Means for converting the light emerging from the second photorefractive / electro-optic element into a second electrical signal and means for evaluating the difference signal between the harvested electrical signal and the second electrical signal.
    Because inverse voltages are applied to the photorefractive / electro-optical elements, the optical signals emerging from the photorefractive / electro-optical elements and thus also the electrical signals derived therefrom are inverse to each other. During the evaluation, a difference is now formed between the first and the second electrical signal. As a result, on the one hand, the signal strength of the measuring signal is doubled, on the other hand, disturbances which occur, e.g. By generating the ultrasonic wave arise, eliminated. In this way, the signal to noise ratio and thus the laser optical detection of a surface movement of a sample can be significantly improved. Advantageously, the measuring arrangement is entirely without mechanically moving parts.
    It should be noted at this point that the presented arrangement can also be regarded as a "vibrometer".
    Further advantageous embodiments and modifications of the invention will become apparent from the dependent claims and from the description in conjunction with the figures. It is advantageous if the laser beam is split into a first and a second reference beam and a first measuring beam which can be aligned with a sample, and a second Meßstrahi is branched off from the first measuring beam reflected by the sample. Similarly, it is advantageous if the measuring arrangement
    Means for dividing the laser beam into a first and a second reference beam as well as a first measuring beam, which can be aligned with a sample, and means for branching a second measuring beam from the one of the projectile. Ν2012Π0500 31/10/2012 11:37
    No .: R075 P.007 / 029 25 11:36:25 31-10-2012 8/29 25 11:36:25 31-10-2012 8/29
    4 • · · · · · · · · · · · · ······································································
    In this way, two substantially identical reference beams or two substantially identical measuring beams can be produced in a comparatively simple manner.
    It is advantageous if the laser beam is split with a first polarizing beam splitter in a first s-polarized reference beam and a first p-polarized measuring beam when ders polarized part in the. With a second polarizing beam divider of the first measuring beam reflected from the sample deflecting branch leading to the photorefractive / electro-optical elements, if a second s-polarized measuring beam is branched off from the first s-polarized measuring beam with a third beam splitter and if a second s-pofarised reference beam from the first s-polarized reference beam is diverted polarized reference beam.
    Similarly, it is advantageous if the measuring arrangement comprises a first polarizing beam splitter for splitting the laser beam into a first s-polarized reference beam and a first p-polarized beam, a second polarizing beam splitter for deflecting the s-polarized part from that from the sample first measuring beam in the branch leading to the photorefractive / electro-optical elements, a third beam splitter for branching a second s-polarized measuring beam from the first s-polarized measuring beam and a fourth beam splitter for branching a second s-polarized reference beam from the first s-polarized reference beam includes.
    In this variant, therefore, a laser beam is first divided into a first reference beam and a first measuring beam. In consequence, a second reference beam is branched off from the first reference beam and a second measuring beam is branched off from the reflected first measuring beam. 31/10/2012 11:38
    No .: R075 N2012 / 1850D P.008 / 029 * 4 ·· 25 11:37:03 31-10-2012 9/29 «t«
    • · · · · · · · # I · »* *« «·> 4 •» · 5
    It is furthermore advantageous if the laser beam passes through a first λ / 2 plate in front of the first polarizing beam splitter, and if a λ / 4 plate is run through by the first measuring beam directed onto the sample or by the first measuring beam reflected by the sample, and is thereby rotated from the p-polarization to an s-polarization.
    Similarly, it is advantageous if the measuring arrangement comprises a harvested λ / 2 plate arranged in the beam direction of the laser beam in front of the first polarizing beam splitter and a λ / 4 plate arranged adjacent to the second polarizing beam splitter in the direction of the sample.
    This makes it possible in particular to carry out the first and the second beam splitter in the same construction, since the Meßstrahi reflected by the sample is rotated by the λ / 4 plate accordingly.
    It is furthermore advantageous if the laser beam is split by a first polarizing beam splitter into a first s-polarized reference beam and a first p-polarized measuring beam when the first p-polarized beam passes through an aperture in a mirror or over a mirror Glass plate is introduced or passed to this prism is passed to the sample when the first measuring beam reflected from the sample with the mirror or after passing through the glass plate is directed with a mirror in the branch leading to the photore-fractal / etektro-optical elements, when the reflected p-polarized measuring beam is rotated into an s-polarization with the aid of a second Aβ-plate, when a second s-polarized measuring beam is diverted from the first polarized measuring beam with a third beam splitter and if a second beam is used polarized reference beam from the first s-polarized reference beam hl is branched off.
    Similarly, it is advantageous if the measuring arrangement comprises a first polarizing beam splitter for splitting the laser beam into a first s-polarized reference beam and a first p-polarized measuring N2012 / 1B500 31/10/2012 11:39
    No .: R075 P.009 / 029 25 11:37:44 31-10-2012 10/29 25 11:37:44 31-10-2012 10/29 9 99 9 9 9 9 9 99 9999 · * • · A) a mirror with an opening adapted to pass the first p-polarized measuring beam through the beam Opening the aperture in the mirror to the sample and directing the first measuring beam reflected from the sample into the branch leading to the photorefractive / electro-optic elements; or b) a glass plate with an integrated prism and a mirror, the glass plate thereto is arranged to lead the first p-polarized measuring beam to the sample by means of the prism and to let pass the first measuring beam reflected from the sample to the mirror, which is adapted to the measuring beam in the to the photorefractive / 'electro-optical elements leading branch, a second λ / 2 plate for rotation of the polarization of the refle p-polarized measuring beam into an s-polarization, a third beam splitter for branching a second s-polarized measuring beam from the first s-polarized measuring beam and a fourth beam splitter for branching a second s-polarized Re * ferenzstrahls from the first s-polarized reference beam.
    In this variant, a mirror with a (centric) opening or b) a glass plate with an integrated or mounted prism is therefore provided instead of the second polarizing beam splitter a). In case a), the measuring beam coming from the laser source passes through the opening in the mirror and hits the sample in succession. The measuring beam reflected by the sample is deflected in succession by the mirror for the most part (i.e., except for the portion lost through the hole) to the photorefractive / electro-optic elements. In case b), the measuring beam coming from the laser source is directed onto the sample by the prism. The measuring beam reflected by the sample passes through the glass plate for the most part (ie, except for the portion lost by the prism) and is increased by means of a mirror deflected the photorefractive / electro-optical elements
    It is also advantageous if the photorefractive / electro-optical elements are formed as photorefractive / electro-optical crystals, which in particular consist of bismuth silicon oxide (BSO), or are formed as photorefractive / eiektro-optical polymers. Crystals of bismuth silicon oxide are known. N2012 / 18S00 31/10/2012 11:39
    No .: R075 P.010 / 029 25 11:38:27 31-10-2012 11/29 99 9 9 · 9 · • 9 9 9 • * 9 9 9 • ♦ 9 9 9 • · 9 9 9 99 999 99 7 9 9 99 99 9 9 9 9 9 9 9 · 9 9999 9 9 9 1 · < 999 • ·· outstandingly suitable for a detection laser run length of 532nm, are relatively easily available, which is why the presented arrangement can be well put into practice.
    Finally, it is advantageous if the arrangement includes an excitation laser which can be aligned with the sample in order to generate an ultrasonic wave. In this way, the sample can be made to vibrate touchstos.
    At this point it is noted that the various variants of the method and the resulting advantages can be applied mutatis mutandis to the presented measuring arrangement and vice versa
    For a better understanding of the invention, this will be explained in more detail with reference to the following figures.
    1 shows a schematically illustrated arrangement for the laser-optical detection of a surface movement of a sample;
    Fig. 2 shows a variant of the arrangement shown in FIG. 1 with a mirror with an opening and
    Fig. 3 shows a variant of the arrangement shown in FIG. 1 with a glass plate with a patch / integrated prism.
    By way of introduction, it should be noted that the same parts are provided with the same reference numerals or the same component designations, wherein the disclosures contained in the entire description can be mutatis mutandis transferred to like parts with the same reference numerals or the same component designations. Also, the location information chosen in the description, such as top, bottom, side, etc. related to the immediately described and illustrated figure and are to be transferred to the new situation mutatis mutandis when a change in position. Furthermore, individual features or combinations of features from the exemplary embodiment shown and described can also represent independent, inventive or erfmdungsgemäße solutions.
    N2012 / 1B50D 31/10/2012 11:40
    No .: R075 P.011 / 029 25 11:39:06 31-10-2012 12/29 • · »I * ·« «* *» * * * * * * * * * * · 8
    1 shows an arrangement for the laser-optical detection of a surface movement of a sample 1, comprising a laser source 2, which generates a laser beam 3, a first photorefractive / electro-optical element 4, a second photorefractive / electro-optical element 5,
    Means 6 for converting the light emerging from the first photorefractive / electro-optical element 4 into a first electrical signal,
    Means 7 for converting the light emerging from the second photorefractive / electro-optical element 5 into a second electrical signal,
    Means 8 for applying mutually inverse voltages to the first and second photorefractive / electro-optical elements 4,5 and
    Means 9 for evaluating the difference signal between the first electrical signal and the second electrical signal
    The two photorefractive / electro-optical elements 4 and 5 are preferably formed as photorefractive / electro-optical crystals, which consist in particular of bismuth silicon oxide (for a detection laser wavelength of 532 nm). However, the two photorefractive / electro-optical elements 4 and 5 can also be made, for example, from a photorefractive polymer.
    In addition, the arrangement includes
    Means for superimposing a first reference beam 10 obtained from the laser beam 3 with a first measuring beam 12 in the first photorefractive / electro-optical element 4, obtained from this laser beam 3 and directed onto the specimen 1 and reflected thereby.
    Means for generating a second reference beam 11 substantially identical to the first reference beam 10,
    Means for generating a first measuring beam 12 substantially identical second measuring beam 13 and
    Means for superimposing the second reference beam 11 with the second measuring beam 13 in a second photorefractive / electro-optical element 5. N2012 / 18500 31/10/2012 11:41
    No .: R075 P.012 / 029 25 11:39:44 31-10-2012 13/29 • «· • · ·» 4 · · »
    9
    For this purpose, the laser beam 3 coming from the laser 2 is split into a first and a second reference beam 10, 11 and a first measuring beam 12 which can be aligned with a sample 1, and a second measuring beam 13 is branched off from the first measuring beam 12 reflected from the sample 1.
    Concretely, the arrangement comprises a first polarizing beam splitter 14 for splitting the laser beam 3 into a first s-polarized reference beam 10 and a first p-polarized beam 13, a second polarizing beam splitter 15 for deflecting the s-polarized portion from that of the sample 1 reflected first measuring beam 12 in the leading to the photorefractive / electro-optical elements 4.5 branch, a third beam plate 16 for branching the second s-polarized measuring beam 13 from the first s-polarized measuring beam 12 and a fourth beam splitter 17 for branching the second s polarized reference beam 11 from the first s-polarized reference beam 10.
    The division ratio of the beam splitters 16..17 is preferably 50:50.
    Furthermore, the arrangement comprises a first λ / 2 plate 16 arranged in the beam direction of the laser beam 3 in front of the first polarizing beam splitter 14, a λ / 4 plate 19 arranged adjacent to the second polarizing beam splitter 15 in the direction of the sample 1 and one in the direction of the photorefractive one / electro-optical elements 4.5 adjacent to the second polarizing beam splitter 15 arranged second Aß plate 20 which is included in Figures 2 and 3, to rotate the polarization of the measuring beam 12.
    In addition, various deflecting mirrors 21..24, as well as various optical lenses 25..30 are included in the arrangement.
    N2012 / 1B50C 31/10/2012 11:41
    No .: R075 P.013 / 029 25 11:40:21 31-10-2012 14/29 • · · * 4 10
    Finally, in Fig. 1, an optional excitation laser 31 is shown, the laser beam 33 passes through the lens 32 and is directed by means of a mirror 34 to the sample 1 to generate an ultrasonic wave in this.
    The function of the arrangement is as follows:
    The laser beam 3 passes from the laser source 2 through a lens system 25 and is then deflected by means of the mirror 21 onto the first λ / 2 plate 18. This rotates the polarization direction of the laser beam 2, which strikes the first polarizing beam splitter 14 in succession. There, the laser beam 2 is introduced into a first s-polarized reference beam 10 and a first p-polarized measuring beam 12.
    The p-polarized measuring beam 12 now passes through the second polarizing beam splitter 15, the second λ / 4 plate 19 and a lens system 26 and then hits the sample 1. This can, as shown here by the directed to the sample 1 excitation laser 31 in known to be vibrated. It is also conceivable, of course, that sample 1 is excited to vibrate in another way.
    Due to the Doppler effect, the speed of the surface movement of the sample 1 now shifts the frequency of the backscattered first measuring beam 12. In addition, there is a phase shift of the backscattered first measuring beam 12 due to the surface movement.
    This in turn passes through the lens system 26, the second λ / 4 plate 19 and then strikes the second polarizing beam splitter 15, where the s-polarized portion of the first measuring beam 12 is deflected by 90 °. By the double pass through the λ / 4-plate 19 of the backscattered measuring beam 12 is rotated by the p-polarization in an s-polarization. The measuring beam 12 then meets a third beam splitter 16, in which the second measuring beam 13 is branched off. N2012 / 1S500 31/10/2012 11:42
    No .: R075 P.014 / 029 25 11:40:59 31-10-2012 15/29 * · * · · · · * «* · 11
    The first reference beam 10 is directed by means of the mirror 22 onto the fourth beam splitter 17. There, the second s-polarized reference beam 11 is branched off from the first s-polarized reference beam 10.
    The first measuring beam 12 now passes through the lens 27 into the first photorefractive / electro-optical element 4. The first reference beam 10 is also directed via the mirror 23 into the photorefractive / electro-optical element 4 and superimposed there with the measuring beam 12, or interferes there with this. Due to the electro-optical pocket effect or because of the Kerr effect, birefringence can be generated in the photorefractive / electro-optical element 4 with the aid of an electric field. This electric field is generated by means of the voltage source 8
    The resulting measuring beam 12 now passes through the lens 28 and is finally converted in the first photocell 6 into a first electrical signal which can be made visible in the oscilloscope 9.
    The second measuring beam 13 passes through the lens 29 and impinges on the second pho-torefraktive / electro-optical element 5. The second reference beam 11 is also directed via the mirror 24 in the second photorefractive / electro-optical element 25 and there with the second Measuring beam 13 superimposed, or interferes there with this. The resulting measuring beam 13 passes through the lens 30 and is finally converted in the second photocell 7 into a second electrical signal which can be made visible in the oscilloscope 9.
    The second measuring beam 13 and the second reference beam 11 are treated in a completely analogous manner as the first measuring beam 12 and the first reference beam 10, but with the difference that the second photorefractive / electro-optical element 5 is subjected to a voltage which is inversely to of the voltage applied to the first photorefractive / electro-optical element 4.
    As a result of the mutually inverse voltages on the photorefractive / electro-optical elements 4, 5, the optical signals obtained from the photorefractive / electro-optical elements 4, 5 and thus also those of the photoresponsive / electro-optical elements 11: N2012 / 185Q0 31/10/2012 11: 43
    No .: R075 P.015 / 029
    25 11:41:41 31-10-2012 16/29 "I
    ♦ · ·
    12 cells 6 and 7 generated signals inverse to each other. In the oscilloscope 9, a difference between the first and the second electrical signal is formed. As a result, on the one hand, the signal strength of the measuring signal is doubled, on the other hand, disturbances which occur during the conversion of the optical signal into an electrical signal are eliminated. In this way, the laser-optical detection of a Oberftächenbewegung a sample can be significantly improved.
    At this point, it is noted that it is not absolutely necessary for the laser-optical detection of the surface movement of the sample 1 to evaluate the holograms arising in the two photorefractive / electro-optical elements 4, 5. Since a phase shift between a reference beam 10, 11 and a measuring beam 12, 13 leads to an amplitude modulation of the measuring beam 12, 13 emerging from the relevant photorefractive / electro-optical element 4, 5 or to a shift in intensity between the pho- torefractive / electromagnetic optical element 4.5 exiting measuring beam 12,13 and a reference beam 10,11 comes, a measurement of the intensity of the exiting measuring beam 12,13 is sufficient. The photoelements 5, 6 can therefore be designed as photodiodes with which the said change in intensity of the detected measuring beam 12, 13 can be detected.
    In Fig. 1, an optional excitation laser 31 is shown, the laser beam 32 passes through the lens 33 and is directed by means of a mirror 34 to the sample 1, to eiseugen in this an ultrasonic wave.
    In a variant of the arrangement shown in FIG. 1, the sample 1 is excited not on its rear side, but on its side facing the measuring beam 12. For this purpose, the laser beam 33 of the excitation laser 31 is directed by a mirror 35 onto a mirror 36. From there, the load beam 33 passes through a lens 37 and finally strikes the sample 1, where it generates a wastewater vapor in the manner already described. The lens 32 can be omitted in favor of the lens 37 (see dashed ray path). N2012 / 1B500 31/10/2012 11:43
    No .: R075 P.016 / 029 25 11:42:23 31-10-2012 17/29 4 4 4 4
    4 4 4 44 13
    In general, the excitation of the sample 1 by means of the excitation laser 31 is not mandatory. Instead of the excitation laser 31, it is also possible to provide another oscillator, for example a piezo oscillator (see also FIG. 2). If the sample 1 vibrates by itself, separate means for vibration generation can be omitted.
    It is also conceivable in a further variant that the arrangement comprises only the left lens of the lens group 26. Furthermore, it is possible, in place of the second λ / 2-Platfe generally provide a polarization controller 20, with which the Polart-sationsrichtung of the measuring beam 12 can be rotated arbitrarily.
    With regard to the polarization directions, it is generally to be noted that the special orientation of the polarization of the reference beams 10, 11 and measuring beams 12, 13 shown in FIG. 1 is not absolutely necessary for the function of the arrangement. The reference beams 10, 11 and measuring beams 12, 13 crossed in the photorefractive / electro-optical elements 4, 5 may also have different polarizations. As a result, other elements for influencing the polarization can also be provided.
    FIG. 2 now shows a somewhat modified variant of the arrangement shown in FIG. 1. Instead of the second polarizing beam splitter 15, a mirror 38 with a (centric) opening is provided in this example. The measuring beam 12 coming from the first polarizing beam splitter 14 passes the hole in the mirror 38, passes through the lens 39 and finally hits the sample 1. The reflected (and scattered) measuring beam 1 is collimated by means of the lens 39 and (for the most part) from Mirror 38 passed to the lens system 40, where it is again bundled and forwarded to the photorefractive / electro-optical elements 4,5.
    FIG. 3 shows a further variant of an arrangement for the laser-optical detection of a surface movement of a sample 1, which is very similar to the arrangement shown in FIG. 2. In contrast to FIG. 2, in this variant, a (full) mirror 42 is provided, which transmits the measuring beam 12 coming from the first polarizing beam splitter 14 onto a glass plate 43 with an integrated lens 31/10/2012 11:44
    No .: R075 P, 017/029 25 11:43:05 31-10-2012 18/29
    The prism causes the measuring beam 12 to be thrown onto the sample 1 above the lens 3Θ. The reflected (and scattered) measuring beam 1 is collimated by means of the lens 39 and passes (for the most part) the glass plate 43. From there it continues on a deflection mirror 44, which directs the measuring beam 12 on the lens system 40 where he bundled again and to the photorefractive / electro-optical elements 4.5 forwarded.
    The exemplary embodiments show possible embodiments of an arrangement according to the invention for the laser-optical detection of a surface movement of a sample 1, wherein it should be noted at this point that the invention is not limited to the specifically illustrated embodiments of the same.
    In particular, it is noted that the illustrated arrangements may in reality also comprise more or fewer components than illustrated.
    The task underlying the independent inventive solutions can be taken from the description. 31/10/2012 11:45
    No .: R075 N2012 / 1B500 P.018 / 029
    «*
    11:46:01 31-10-2012 • ························
    LIST OF REFERENCE NUMBERS
    sample
    laser source
    Laser beam first photorefractive / electro-optical element second photorefractive / electro-optical element first photoelement second photoelement voltage source oscilloscope first reference beam second reference beam first measuring beam second measuring beam first polarizing beam splitter second polarizing beam splitter third beam splitter fourth beam splitter first Aβ plate λ / 4 plate second λ / 2 plate / polarization plate
    Deflection Mirror Deflection Mirror Deflection Mirror Deflection Mirror Optical Lens Optical Lens Optical Lens Optical Lens Optical Lens Optical Lens
    Excitation laser optical lens
    Laser beam of the excitation laser
    deflecting
    deflecting
    Deflection mirror optical lens mirror with aperture / hole optical lens optical lens N2012 / 18500 31/10/2012 11:47
    No .: R075 P, 023/029 2S 11:46:27 31-10-2012 24/29 • · ·· 9 · 40
    * * • · • 49 • 4
    41 Piezo oscillator 42 Deflection mirror 43 Glass plate with integrated / mounted prism 44 Deflection mirror N2012 / 18500 31/10/2012 11:48
    No .: R075 P.024 / 029
    权利要求:
    Claims (9)
    [1]
    1 25 11:43:35 31-10-2012 19 ^ 29 Φ m Claims 1. A method for laser-optical detection of a surface movement of a sample (1), in which a first reference beam (10) obtained from a laser beam (3) ) is superimposed on one of the said laser beam (3), on the sample (I) aligned and reflected by this first measuring beam (12) in a first photorefractive / electro-optical element (4) and that from the first photorefractive / elektro -optical element (4) is converted into a first electrical signal and subsequently evaluated, characterized in that a second reference beam (II) substantially identical to the first reference beam (10) is substantially identical to the first measuring beam (12) Measuring beam (13) in a second photorefractive / electro-optical element (5) is superimposed and the light emerging from the second photorefractive / electro-optical element (5) in a second electrical signal is subtracted, which is subtracted before the evaluation of the first electrical signal, wherein the two photorefractive / electro-optical elements (4,5) to each other inverse voltages are applied.
    [2]
    2. The method according to claim 1, characterized in that the laser beam (3) in a first and a second reference beam (10,11) and on a sample (1) alignable first measuring beam (12) is divided and of the sample (1) a first measuring beam (12), a second measuring beam (13) is diverted.
    [3]
    3. The method according to claim 2, characterized in that the laser beam (3) with a first polarizing beam splitter (14) in a first s-polarized reference beam (10) and a first p-polarized measuring beam (12) aufgeteüt that with a second polarizing beam splitter (15) of the first measuring beam (12) reflected from the sample (1), the s-polarized part in the N2012 / 1M00 31/10/2012 11:45 No .: R075 P.019 / 029 25 11 : 44: 14 31-10-2012 20/29 ·· * ♦ · t · * · ♦ · «« ····· «· * * · · · ··· ·· * · * ···· "···························" ··················································································································································································································· 16) a second s-polarized measuring beam (13) is branched off from the first s-polarized measuring beam (12) and that with a fourth beam splitter (17), a second s-polarized reference beam (11) from the first s-polarisie the reference beam (10) is branched off.
    [4]
    4. The method according to claim 3, characterized in that the laser beam (3) in front of the first polarizing beam splitter (14) passes through a first λ / 2 plate (18) and that a λ / 4-Platfe (19) of which on the Sample (1) directed first measuring beam (12) or from the of the sample (1) reflected first measuring beam (12) durchteufen wild.
    [5]
    5. The method according to claim 2, characterized in that the laser beam (3) with a first polarizing beam splitter (14) in a first s-polarized reference beam (10) and a first p-polarisieiten measuring beam (12) is divided, that the first p-polarized measuring beam (12) through an opening in a mirror (38) or via a in a glass plate (43) integrated or placed on this prism to the sample (1) is passed, that of the sample (1) reflected first measuring beam (12) is guided with the mirror (38) or after passing through the glass plate (43) with a mirror (44) in the leading to the photorefractive / electro-optical elements (4,5) branch that the first measuring beam ( 12) passes through a second λ / 2 plate (20) that with a third beam splitter (16) a second s-polarized measuring beam (13) is branched off from the first s-polarized measuring beam (12) and that with a fourth beam splitter (17 ) a second s-pole Arranged reference beam (11) from the first s-polarized reference beam (10) is branched off.
    [6]
    6. Arrangement for the laser-optical detection of a surface movement of a sample (1), comprising N2012 / 18500 31/10/2012 11:46 No .: R075 P, 020/029 25 11:44:52 31-10-2012 21 / 29

    A laser source (2) which generates a laser beam (3), a first photorefractive / electro-optical element (4), means for the upper day of a first reference beam (10) obtained from a laser beam (3) with a first measuring beam (12) in the first photorefractive / electro-optical element (4), aligned with the sample (1) and reflected by the sample (1), means for converting it from the first photorefractive / electro-optical element (4) emitting light into a first electrical signal, characterized by a second photorefractive / elektrD optical element (5), means (8) for applying inverse voltages to the first and the second photorefractive / etektro- optical element (4, 5), means for generating a second reference beam (11) substantially identical to the first reference beam (10), means for generating a second one substantially identical to the first measuring beam (12) Measuring beam (13), means for superposing the second reference beam (11) with the second measuring beam (13) in the second photorefrektive / electro-optical element (5), means for converting the from the second photorefractive / electro-optical element (5 ) exiting light into a second electrical signal and means (9) for evaluating the difference signal between the first electrical signal and the second electrical signal.
    [7]
    7. Arrangement according to claim 6, characterized by means for dividing the laser beam (3) into a first and a second reference beam (10,11) and on a robe (1) alignable first measuring beam (12) and means for branching a second measuring beam (13) of the first measuring beam (12) reflected from the sample (1). 6. Arrangement according to claim 7, characterized by a first polarizing beam splitter (14) for splitting the laser 31/10/2012 11:46 No .: R075 P.021 / 029 25 11:45:31 31-10-2012 22 / 29

    ·

    4 beam (3) into a first s-polarized reference beam (10) and a first p-polarized measuring beam (12), a second polarizing beam splitter (15) for deflecting the s-polarized portion of the first of the sample (1) reflected Measuring beam (12) in the leading to the photorefractive / electro-optical elements (4, 5) branch, a third beam splitter (16) for branching a second s-polarized Meßstrahls (13) from the first s-polarized Meßstrahl (12) and a fourth beam splitter (17) for branching a second s-polarized reference beam (11) from the first s-polarized reference beam (10).
    [8]
    9. Arrangement according to one of claims 6 to 8, characterized in that the photorefractive / electro-optical elements (4,5) are formed as photorefractive / electro-optical crystals or photorefractive / electro-optical polymers.
    [9]
    10. Arrangement according to one of claims 6 to 9, characterized by an on the sample (1) alignable excitation laser (31) for generating an ultrasonic wave. Fili Gesellschaft m.b.H. by

    artner N2012 / 1B500 31/10/2012 11:47 R075 P.022 / 029
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    法律状态:
    2021-06-15| MM01| Lapse because of not paying annual fees|Effective date: 20201031 |
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    ATA1171/2012A|AT512908B1|2012-10-31|2012-10-31|Method and device for the laser-optical detection of a surface movement of a sample|ATA1171/2012A| AT512908B1|2012-10-31|2012-10-31|Method and device for the laser-optical detection of a surface movement of a sample|
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